Method of forming a varactor with an increased linear tuning...

Semiconductor device manufacturing: process – Voltage variable capacitance device manufacture

Reexamination Certificate

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Reexamination Certificate

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07067384

ABSTRACT:
The linear tuning range of a semiconductor varactor is substantially increased by forming a lightly-doped drain region of a first conductivity type in a semiconductor material of a second conductivity type between a heavily-doped diffusion of the second conductivity type and a lower-plate region of the semiconductor material.

REFERENCES:
patent: 5338966 (1994-08-01), Kasahara
patent: 6225674 (2001-05-01), Lim et al.
patent: 6320474 (2001-11-01), Kamiya et al.
patent: 6472282 (2002-10-01), Yu
patent: 2002/0074589 (2002-06-01), Benaissa et al.

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