Method of forming a thin film of a metal or metal compound on a

Details Method of forming a thin film of a metal or metal compound on a Method of forming a thin film of a metal or metal compound on a

1985-09-26

1987-03-17

Childs, Sadie L.

Coating processes

Interior of hollow article coating

Coating by vapor, gas, mist, or smoke

427250, 427253, 427255, 4272552, 4272557, 427404, 4274197, B05D 722, C23C 1606

Patent

active

046506985

ABSTRACT:
A method of forming with good reproducibility a high-quality thin film of a metal or metal compound by a vapor growth method on a substrate placed in a quartz reaction tube which has the steps of, prior to the formation of the thin film forming an intermediate film of a material having good adhesion with both quartz, and the metal or metal compound on the inner wall of the reaction tube, and forming a film of the metal or metal compound for the thin film on the intermediate film.

REFERENCES:
patent: 2884894 (1959-05-01), Ruppert et al.
patent: 4180596 (1979-12-01), Crowder et al.
patent: 4391846 (1983-07-01), Raymond

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