Metal working – Method of mechanical manufacture – Electrical device making
Patent
1996-06-11
1998-01-27
Hall, Carl E.
Metal working
Method of mechanical manufacture
Electrical device making
2960301, 360104, G11B 542
Patent
active
057110638
ABSTRACT:
An apparatus comprising a magnetic head suspension assembly (10) comprised of a rectangular portion (12), load beam (14) and flexure (16) fabricated from a silicon structure using the etching techniques of the integrated circuit fabrication industry. Said magnetic head suspension assembly (10) having electrical leads (23) to a slider, a pre-amp circuit (25) and a microactuator (27) fabricated directly thereon. A system of providing a loading force passing to slider (50) comprising either a tapered base plate (40) adapted to be held by a horizontally oriented actuator arm or an actuator arm (60) having at least one angled receiving surface (62,64) for attachment to said suspension assembly. The method of forming a magnetic head suspension assembly (10) from an etched silicon structure comprising a cutting step comprising cutting said silicon structure into the silhouette shape of a magnetic head suspension assembly, having a rectangular portion (12), a load beam (14) and a flexure (16), said flexure being cut in a shape such that finger members (18), slider bond tongue (19) and dimple tongue (20) appear thereon, and subsequent to said cutting step, the step of photo-etching regions of said silicon structure to reduce thickness of said silicon structure in certain regions, said photo-etching leaving a remaining non-etched small plateau area which is adapted to act as a point or dimple for an attached slider to gimbal about.
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Budde Richard August
Glumac Daniel E.
Hardie Cal E.
Ryan Patrick J.
Schultz Kevin Jon
Hall Carl E.
Seagate Technology Inc.
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