Method of forming a superconductor film

Coating processes – Electrical product produced – Superconductor

Reexamination Certificate

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C029S599000, C427S561000, C427S593000, C505S470000, C505S473000, C204S192240

Reexamination Certificate

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06929820

ABSTRACT:
A method includes forming an as-grown film of a superconductor composed of a MgB2compound which is made by simultaneous evaporation of magnesium and boron. The as-grown film is superconductive without an annealing process to make the film superconductive. The method can be applied to fabricate an integrated circuit of the superconductor film, because a high temperature annealing process to make the as-grown film superconductive is not needed.

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Atsushi Saito, et al., “Fabrication of Josephson Junctions As-Grown MgB2Thin Films,” The Japan Society of Applied Physics, No. 49, Mar., 2002, Abstract 28a-ZB-3.
Atsushi Saito, et al., “As-Grown Deposition of MgB2Thin Films and Fabrication of Josephson Junctions”, The Institute of Electrons, Information and Communication Engineers, Technical Report of IEICE.SCE2002-2,MW2002-2 (Apr. 2002).
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Hisashi Shimakage, et al., “Low Temperature Fabrication of As-Grown MgB2Thin Films by Carrousel-Type Sputtering Apparatus”, The Japan Society of Applied Physic, No. 62, Sep. 12, 2001, Abstract 12p-M-10.
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Hisashi Shimakage, et al., “Low Temperature Fabrication of As-Grown MgB2Thin Films by Carrousel-Type Sputtering Apparatus”, The Japan Society of Applied Physic, No. 62, Sep. 12, 2001, Abstract 12p-M-10.
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S.R. Shinde et al. “Superconducting MgB2thin films by pulsed laser deposition”,Applied Physics Letter, vol. 79, No. 2, Jul. 9, 2001; pp. 227-229.

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