Method of forming a substrate for use in calibrating a...

Details Method of forming a substrate for use in calibrating a... Method of forming a substrate for use in calibrating a...

2007-03-27

2009-10-20

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Methods

C355S053000

Reexamination Certificate

active

07605907

ABSTRACT:
The present invention provides a method for forming a substrate for use in calibrating a metrology tool in order to compensate for orientation-dependent variations within the metrology tool.

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