Method of forming a stress relieved amorphous tetrahedrally-coor

Details Method of forming a stress relieved amorphous tetrahedrally-coor Method of forming a stress relieved amorphous tetrahedrally-coor

1999-11-23

2000-08-15

King, Roy V.

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

4273722, 427596, 427553, 427554, 427902, 427904, C23C 1626, B05D 302

Patent

active

061033057

ABSTRACT:
A stress-relieved amorphous-diamond film is formed by depositing an amorphous diamond film with specific atomic structure and bonding on to a substrate, and annealing the film at sufficiently high temperature to relieve the compressive stress in said film without significantly softening said film. The maximum annealing temperature is preferably on the order of 650.degree. C., a much lower value than is expected from the annealing behavior of other materials.

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patent: 5569501 (1996-10-01), Bailey et al.
Park et al, Appl. Phys. Lett. 68(25) pp. 3594-3595, Jun. 1996.
Bunshah et al, "Deposition Technologies For Films and Coatings," Noyes Publication, pp. 68-70.
Friedmann et al, Appl. Phys. Lett,. 71(26), pp. 3820-3822, Dec. 1997.

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