Fishing – trapping – and vermin destroying
Patent
1994-06-29
1995-04-11
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 43, 437 89, 437 62, 148DIG150, H01L 21265
Patent
active
054057957
ABSTRACT:
An SOI transistor has a self-aligned body contact formed through an extension to the gate, thereby forming the body contact with minimal increase in area and also avoiding the need to tie the source to the body, as in prior art schemes that passed the body contact through the source. The body contact aperture is formed by raising the source and drain to define an initial aperture, depositing a conformal layer that is etched to create aperture-defining sidewalls and etching the contact aperture using these sidewalls to define sidewall support members that support insulating sidewalls to isolate the collection electrode from both the gate and from the source and drain.
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Beyer Klaus D.
Buti Taqi N.
Hsieh Chang-Ming
Hsu Louis L.
Hearn Brian E.
International Business Machines - Corporation
Nguyen Tuan
LandOfFree
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