Method of forming a self-aligned capacitor

Details Method of forming a self-aligned capacitor Method of forming a self-aligned capacitor

1995-03-15

1996-01-02

Wilczewski, Mary

Fishing, trapping, and vermin destroying

437919, H01L 2170, H01L 2700

Patent

active

054808316

ABSTRACT:
A self-aligned capacitor structure and method of making it includes an insulating support substrate with the capacitor disposed on the insulating substrate with a first conducting extending across the capacitor in the first dimension. The capacitor includes a first electrode interconnected with the first conductor, a second electrode supported by the substrate and interconnected with the second conductor, and a dielectric medium between the first and second electrodes. The first and second electrodes being coterminous in both directions in the first dimension for eliminating parasitic capacitance between the first conductor and the second electrode.

REFERENCES:
patent: 5037772 (1991-08-01), McDonald
patent: 5173437 (1992-12-01), Chi
patent: 5397729 (1995-03-01), Kayanuma et al.

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