Pumps – Electrical or getter type
Reexamination Certificate
2005-08-02
2005-08-02
La Villa, Michael (Department: 1775)
Pumps
Electrical or getter type
C417S051000, C252S181500, C252S181600, C257S682000, C428S660000, C428S666000, C428S672000
Reexamination Certificate
active
06923625
ABSTRACT:
A method for preventing contamination, oxidation and gas absorption of reactive materials, and articles formed thereby. The method generally entails depositing a first layer of a reactive material and a second layer of a substantially nonreactive material so that the second layer protects the first layer from a surrounding atmosphere. For example, the first and second layers may be deposited to form a film on a surface within a chamber that is desired to be maintained in a vacuum during use of the article. The second layer is sufficiently thin such that appropriately heating the first and second layers causes the reactive material of the first layer to become interdiffused with the nonreactive material of the second layer, to the extent that at least a portion of the reactive material is able to react and getter gases from the surrounding atmosphere.
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Hartman Domenica N.S.
Hartman Gary M.
Hartman & Hartman
Integrated Sensing Systems, Inc.
La Villa Michael
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