Method of forming a projection having a micro-aperture, projecti

Details Method of forming a projection having a micro-aperture, projecti Method of forming a projection having a micro-aperture, projecti

1998-08-24

2000-12-05

Stinson, Frankie L.

Etching a substrate: processes

Forming or treating an article whose final configuration has...

427251, 427309, B81C 300

Patent

active

061562157

ABSTRACT:
A projection having a micro-aperture is formed by formiNg a dent having a pointed front end on a substrate, then depositing a light blocking material on the substrate except the front end of the dent, and peeling off the light blocking material from the substrate. The projection is suited as an optical probe of scanning near-field optical microscope (SNOM) for detecting or emitting light through the micro-aperture. For this purpose, the projection is formed on the end of a cantilever or on the end of an optical fiber. The dent having a pointed front end can be formed typically by patterned crystal-axis-anisotropic etching of a silicon substrate and subsequent thermal oxidation of the silicon surface.

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