Plastic and nonmetallic article shaping or treating: processes – With severing – removing material from preform mechanically,... – Surface finishing
Reexamination Certificate
2008-07-08
2008-07-08
Halpern, Mark (Department: 1791)
Plastic and nonmetallic article shaping or treating: processes
With severing, removing material from preform mechanically,...
Surface finishing
C264S161000, C264S109000, C264S118000, C264S051000, C451S526000, C451S041000, C451S059000
Reexamination Certificate
active
10956847
ABSTRACT:
The present invention provides a method of forming a chemical mechanical polishing pad, comprising providing a tank with polymeric materials and providing a storage hopper with microspheres having an initial bulk density, wherein the storage hopper further comprises a porous membrane provided over a plenum. The method further provides the steps of connecting a fluidizing gas source to the plenum through a gas inlet line and fluidizing the microspheres and reducing the initial bulk density by feeding gas into the plenum. In addition, the method further provides the steps of providing a delivery system for delivering the polymeric materials and the microspheres to a mixer, forming a mixture of the polymeric materials and the microspheres, pouring the mixture into a mold to form a molded product and cutting the molded product into the polishing pad.
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Koetas Joseph P.
Leviton Alan E.
Norton Kari-Ell
November Samuel J.
Robertson Malcolm W.
Deibert Thomas S.
Halpern Mark
Oh Edwin
Rohm and Haas Electronic Materials CMP Holdings Inc.
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