Method of forming a plateau and a cover on the plateau in partic

Details Method of forming a plateau and a cover on the plateau in partic Method of forming a plateau and a cover on the plateau in partic

1996-06-19

1998-05-19

Nguyen, Tuan H.

Fishing, trapping, and vermin destroying

438 31, 438696, H01L 2100

Patent

active

057535248

ABSTRACT:
Prior to using etching to form a plateau that is to constitute a laser ridge and that is to be provided with a cover constituting a top electrode, the surface of the cover is initially protected with a dielectric mask and the flanks of the cover are then protected with a dielectric coating. The dielectric coating is initially deposited uniformly over the surface and the flanks. It is then etched by directional means so that it remains on the flanks only. The invention is particularly applicable to making an optical amplifier.

REFERENCES:
patent: 4857477 (1989-08-01), Kanamori
T. Sanada et al., "An Improved Technique for Fabricating High Quantum Efficiency Ridge Waveguide AlGaAs/GaSs Quantum Well Lasers", Japanese Journal of Applied Pysics, vol. 25, No. 9, Sep. 1986, Tokyo, JP pp.1443-1444.
Patent Abstracts of Japan, vol. 011, No. 187(E-516), 16 Jun. 1987 & JP-A-62 015876 (Matsushita Electric Ind Co Ltd)24 Jan. 1987.

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