Method of forming a passivation film

Metal treatment – Process of modifying or maintaining internal physical... – Processes of coating utilizing a reactive composition which...

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148286, 148287, 4272554, C23C 814, C23C 818, C22C 3844

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active

059066881

ABSTRACT:
A reduced pressure device the reduced pressure chamber of which is constructed of stainless steel, and includes a passivation film formed on the exposed interior surface thereof. The film has a thickness of more than 50 .ANG. and is composed of two or more layers. One layer contains mainly chrome oxide formed in the vicinity of the interface of the stainless steel and the passivation film. The other layer contains mainly iron oxide formed in the vicinity of the surface of the passivation film. A passivation film may also be used with a thickness of more than 50 .ANG. and containing mainly a mixture of chrome oxide and iron oxide. Lastly a passivation film may also be used with thickness of more than 50 .ANG. and containing mainly chrome oxide.

REFERENCES:
patent: 2926885 (1960-03-01), Szulc et al.
patent: 3268203 (1966-08-01), Gilmont et al.
patent: 3343999 (1967-09-01), Petermann
patent: 3811874 (1974-05-01), Caule et al.
patent: 3969151 (1976-07-01), Hill et al.
patent: 4120331 (1978-10-01), Krivanek, III
patent: 4153480 (1979-05-01), Coester et al.
patent: 4168184 (1979-09-01), Hultquist et al.
patent: 4313815 (1982-02-01), Graves, Jr. et al.
patent: 4384918 (1983-05-01), Abe
patent: 4424083 (1984-01-01), Polizzotti et al.
patent: 4446815 (1984-05-01), Kalbskopf et al.
patent: 4518440 (1985-05-01), Phillips, Jr.
patent: 4613326 (1986-09-01), Szwarc
patent: 4714091 (1987-12-01), Wagner
patent: 4715921 (1987-12-01), Maher et al.
patent: 4726399 (1988-02-01), Miller
patent: 4747577 (1988-05-01), Dimock
patent: 4756810 (1988-07-01), Lamont, Jr. et al.
patent: 4812712 (1989-03-01), Ohnishi et al.
patent: 4818326 (1989-04-01), Liu et al.
patent: 4824546 (1989-04-01), Ohmi
patent: 4851101 (1989-07-01), Hutchinson
patent: 4869301 (1989-09-01), Ohmi et al.
patent: 4887645 (1989-12-01), Kerger
patent: 4897171 (1990-01-01), Ohmi
patent: 4917136 (1990-04-01), Ohmi et al.
patent: 4929287 (1990-05-01), Hirbop
patent: 4944860 (1990-07-01), Bramhall, Jr. et al.
patent: 5082242 (1992-01-01), Bonne et al.
patent: 5134011 (1992-07-01), Kamiya et al.
patent: 5139623 (1992-08-01), Ohmi et al.
patent: 5161774 (1992-11-01), Engelsdorf et al.
patent: 5169515 (1992-12-01), Ngan et al.
patent: 5192610 (1993-03-01), Lorimer et al.
patent: 5213629 (1993-05-01), Ishii et al.
patent: 5226968 (1993-07-01), Ohmi et al.
patent: 5259935 (1993-11-01), Davidson et al.
patent: 5295668 (1994-03-01), Ohmi et al.
Ohmi, T., "Outgas-Free Corrosion Resistant Surface Passivation of Stainless Steel For Advanced ULSI Process Equipment", Proceedings of the Fourth Symposium on Automated Integrated Circuits Manufacturing vol. 89-2, p. 99.

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