Method of forming a nano-structure and the nano-structure

Details Method of forming a nano-structure and the nano-structure Method of forming a nano-structure and the nano-structure

2011-08-09

2011-08-09

Cleveland, Michael (Department: 1712)

Coating processes

Nonuniform coating

Applying superposed diverse coatings or coating a coated base

C427S256000, C427S258000, C427S261000, C427S270000, C427S271000, C427S275000, C427S276000, C427S272000, C427S282000, C438S400000, C438S424000

Reexamination Certificate

active

07993706

ABSTRACT:
A method of forming a nano-structure can form a fine pattern easily, and the nano-structure obtained by the method is provided. A method of forming a nano-structure comprising forming a thin film by a liquid phase adsorption on surface of a template formed on a substrate, and removing a portion of the thin film, and removing the template is used.

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Machine Translation of JP 2003-077922 (no date available).
Machine Translation of JP 1994-224161 (no date available).
Search Report from corresponding European Application No. 05751208.9 dated Oct. 6, 2010.

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