Method of forming a microcircuit via interconnect

Details Method of forming a microcircuit via interconnect Method of forming a microcircuit via interconnect

1995-02-06

1997-02-04

Niebling, John

Fishing, trapping, and vermin destroying

437205, 437208, 437915, H01L 21441

Patent

active

055997449

ABSTRACT:
A method for forming a conductive vias in a non-conductive substrate having a through-hole formed therein intermediate two side thereof. The method utilizes the steps of: applying gold paste to the through-hole so as to provide electrical conduction therethrough; and under firing the gold paste when a thin conductive film is present upon the substrate and fully firing the gold paste when no thin conductive film is present on the substrate. Under firing the gold paste when a thin-film is present upon the substrate prevents degradation of the thin conductive film. Subsequent processing of the gold paste assures the integrity and reliability thereof. Thus, the gold paste provides enhanced conductivity and improved reliability, as compared to contemporary thin-film vias.

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