Method of forming a micro-rotating device, and a...

Details Method of forming a micro-rotating device, and a... Method of forming a micro-rotating device, and a...

2007-07-03

2007-07-03

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Rotary

C029S596000

Reexamination Certificate

active

10915142

ABSTRACT:
A micro-rotating device has a rotor200(of diameter not more than 1.5 cm), a shaft202threaded through the rotor200, and a shaft holder207for holding the shaft. The shaft holders are formed by etching an Si substrate501to form multiple shaft receiving openings508. The rotors and shafts too are formed from respective Si substrates301, 401. The rotors200are located over the shaft holders207, and the shafts threaded through the rotors200into the openings509and attached there by a wafer bonding process. Then the substrate501is partitioned to give individual motor elements. Protrusions206extend from the rotor in the direction towards the stator to space the rotor from the shaft holder.

REFERENCES:
patent: 5189323 (1993-02-01), Carr et al.
patent: 5252881 (1993-10-01), Muller et al.
patent: 5955818 (1999-09-01), Bertin et al.
patent: 6657339 (2003-12-01), Herndon et al.
patent: 6961213 (2005-11-01), Ameen et al.
patent: 2002/0096018 (2002-07-01), Rodgers et al.

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