Method of forming a metal trace with reduced RF impedance...

Details Method of forming a metal trace with reduced RF impedance... Method of forming a metal trace with reduced RF impedance...

2007-12-18

2007-12-18

Nguyen, Tuan H. (Department: 2813)

Semiconductor device manufacturing: process

Making passive device

C438S639000

Reexamination Certificate

active

10820476

ABSTRACT:
The RF impedance of a metal trace at gigahertz frequencies is reduced by forming the metal trace to have a base region and a number of fingers that extend away from the base region. When formed to have a number of loops, the metal trace forms an inductor with an increased Q.

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