Method of forming a metal oxide film and microwave power...

Electric heating – Metal heating – By arc

Reexamination Certificate

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C219S121430, C428S446000

Reexamination Certificate

active

07847209

ABSTRACT:
A method of forming a metal oxide film by the plasma CVD method and which includes reacting chiefly an organometal by a glow discharge in a low output region and, then, reacting the organometal with an oxidizing gas by the glow discharge in a high-output region to form a metal oxide film on the surface of a plastic substrate via an organic layer. This method forms a thin film having excellent adhesiveness, softness and flexibility on the surface of a plastic substrate relying on the plasma CVD method.

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