Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-05-25
2008-12-16
Kim, Paul D (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S606000, C029S825000, C029S830000, C029S843000, C029S846000, C257SE21218, C257S415000, C257S419000, C257S619000, C257S684000, C361S277000, C361S278000, C361S280000, C361S281000, C438S052000, C438S053000, C438S071000, C438S121000
Reexamination Certificate
active
07464459
ABSTRACT:
A method of forming an actuator and a relay using a micro-electromechanical (MEMS)-based process is disclosed. The method first forms the lower sections of a square copper coil, and then forms a magnetic core member. The magnetic core member, which lies directly over the lower coil sections, is electrically isolated from the lower coil sections. The method next forms the side and upper sections of the coil, followed by the formation of an overlying cantilevered magnetic flexible member. Switch electrodes, which are separated by a switch gap, can be formed on the magnetic core member and the magnetic flexible member, and closed and opened in response to the electromagnetic field that arises in response to a current in the coil.
REFERENCES:
patent: 5880921 (1999-03-01), Tham et al.
patent: 6169826 (2001-01-01), Nishiyama et al.
patent: 6360036 (2002-03-01), Couillard
patent: 6573822 (2003-06-01), Ma et al.
patent: 7095919 (2006-08-01), Kawamoto et al.
patent: 7381663 (2008-06-01), Sato et al.
patent: 2004/0022484 (2004-02-01), Sigloch et al.
Gary D. Gray Jr., et al. “Magnetically Bistable Actuator Part 2. Fabrication and Performance”, Sensors and Actuators A: Physical, vol. 119, Issue 2, Apr. 13, 2005, pp. 502-511.
Gary D. Gray Jr. and Paul A. Kohl, “Magnetically Bistable Actuator Part 1. Ultra-Low Switching Energy And Modeling”, Sensors and Actuators A: Physical, vol. 119, Issue 2, Apr. 13, 2005, pp. 489-501.
John A. Wright, et al., “Micro-Miniature Electromagnetic Switches Fabricated Using MEMS Technology”, Proceedings: 46th Annual International Relay Conference: NARM '98, Oak Brook, Illinois, Apr. 1998, pp. 13-1 to 13-4.
Han S. Lee, et al., “Micro-Electro-Mechanical Relays—Design Concepts and Process Demonstrations”, Joint 22nd International Conference on Electrical Contacts and 50th IEEE HOLM Conference Electrical Contacts, Sep. 20-23, 2004, pp. 242-247.
J.H. Fabian, et al., “Maxtrix Combination of MEMS Relays”, 17th IEEE International Conference on Micro Electro Mechanical Systems, 2004, pp. 861-864.
Ernst Thielicke and Ernst Obermeier, “A Fast Switching Surface Micromachined Electrostatic Relay”, The 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, Jun. 8-12, 2003, pp. 899-902.
Ren Wanbin, et al., “Finite Element Analysis of Magnetic Structures for Micro-Electro-Mechanical Relays”, Proceedings of the 51st IEEE HOLM Conference on Electrical Contacts, Sep. 26-28, 2005, pp. 265-269.
John A. Wright, et al., “Magnetostatic MEMS Relays For The Miniaturization Of Brushless DC Motor Controllers”, 12th IEEE International Conference on Micro Electro Mechanical Systems, Jan. 17-21, 1999, pp. 594-599.
U.S. Appl. No. 11/805,933, filed May 25, 2007, Niblock et al.
U.S. Appl. No. 11/805,934, filed May 25, 2007, Niblock et al.
U.S. Appl. No. 11/805,955, filed May 25, 2007, Niblock et al.
U.S. Appl. No. 11/807,162, filed May 25, 2007, Niblock et al.
Johnson Peter
Niblock Trevor
Kim Paul D
National Semiconductor Corporation
Pickering Mark C.
LandOfFree
Method of forming a MEMS actuator and relay with vertical... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of forming a MEMS actuator and relay with vertical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of forming a MEMS actuator and relay with vertical... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4025211