Semiconductor device manufacturing: process – Having superconductive component
Patent
1997-07-14
1998-07-14
Tsai, Jey
Semiconductor device manufacturing: process
Having superconductive component
H01L 3924
Patent
active
057803145
ABSTRACT:
A superconductive electrical device is operable simultaneously at relatively higher temperatures, i.e., 60-90K, and at relatively lower temperatures, i.e., less than 12K. The device comprises a non-superconductive substrate with two regions, a first relatively high temperature region and a second relatively low temperature region. A high temperature superconductor is on the first region and a portion of the second region. A dielectric layer is on the high temperature superconductor. A low temperature superconductor is on the second region of the substrate and on a portion of the dielectric layer. Integrated circuit chips can be secured to both superconductors, thereby yielding a superconductive multi-chip module operable at two different temperatures, such as in a cryo-cooler with two temperature stages.
REFERENCES:
patent: 4809133 (1989-02-01), Faris et al.
patent: 5430012 (1995-07-01), Nakamura et al.
patent: 5567673 (1996-10-01), Face et al.
TRW Inc.
Tsai Jey
Yatsko Michael S.
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