Method of forming a functional film

Details Method of forming a functional film Method of forming a functional film

1994-09-13

1996-12-24

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Screen other than for cathode-ray tube

430 20, 430293, 430394, G03F 900

Patent

active

055872603

ABSTRACT:
There is provided a method of forming a micro-patterned functional film with a high precision on a substrate comprising:

REFERENCES:
patent: 5186801 (1993-02-01), Matsumura et al.
patent: 5214541 (1993-05-01), Yamasita et al.
patent: 5385795 (1995-01-01), Yuasa et al.

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