Method of forming a fluid ejection device with a compressive...

Details Method of forming a fluid ejection device with a compressive... Method of forming a fluid ejection device with a compressive...

2006-11-07

2006-11-07

Meeks, Timothy (Department: 1762)

Coating processes

Applying superposed diverse coating or coating a coated base

Metal coating

C427S123000, C427S126100, C427S419100

Reexamination Certificate

active

07132132

ABSTRACT:
A method of forming a fluid ejection device is disclosed. The steps of forming the fluid ejection device may include forming a heating element on a substrate. The steps for forming the fluid ejection device may further include depositing a buffer layer over the heating element, and depositing a layer of compressive alpha-tantalum on the buffer layer with lattice matching between the layer of compressive alpha-tantalum and the buffer layer.

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