Method of forming a dielectric thin film having low loss composi

Details Method of forming a dielectric thin film having low loss composi Method of forming a dielectric thin film having low loss composi

1999-10-19

2000-11-14

Dutton, Brian

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

501134, 501136, H01L 2100, C04B 3546

Patent

active

061469076

ABSTRACT:
A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.

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