Method of forming a device

Details Method of forming a device Method of forming a device

2006-08-15

2006-08-15

Trinh, Michael (Department: 2822)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S255000

Reexamination Certificate

active

07091101

ABSTRACT:
A method of forming a device is disclosed. The method includes forming a capacitor, and forming the capacitor includes forming a first electrode. The first electrode includes at least one non-smooth surface and is formed from a material selected from the group consisting of transition metals, conductive oxides, alloys thereof, and combinations thereof. Forming the capacitor also includes forming a dielectric on the first electrode, and forming a second electrode on the dielectric. The second electrode includes at least one non-smooth surface.

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