Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1982-06-22
1983-12-13
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
204192N, 204177, C23C 1304
Patent
active
044204981
ABSTRACT:
There is disclosed a method for forming a decorative metallic nitride coating on the surface of a substrate comprising the steps of disposing said substrate to be coated as a cathode in a material gas atmosphere at a pressure of 0.1 to 10 Torr, with said substrate maintained at a temperature of 200.degree. to 1000.degree. C., and applying a voltage of 200 to 8000 V to said substrate to prepare a direct current glow discharge space in the vicinity of said substrate, the improvement which comprises using as said material gas a mixed gas of a halide of titanium, zirconium or hafnium; hydrogen; and nitrogen, and controlling the current density of the electric current flowing through said substrate to be within the range of 0.01 to 1 mA/cm.sup.2.
The method according to the present invention provides a uniform and beautiful metallic nitride coating which has a metallic luster stable with time, is excellent in mar resistance, and is suitable for decoration. Further, according to the method of this invention, a decorative metallic nitride coating capable of varying a tone on a metallic luster surface over a wide range can be formed.
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Hirose Masahiko
Nakagawa Masatoshi
Ochi Yoshiharu
Yasui Tsuyoshi
Newsome John H.
Tokyo Shibaura Denki Kabushiki Kaisha
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