Method of forming a curved implanted region in a semiconductor b

Metal treatment – Compositions – Heat treating

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148187, 357 20, 357 48, 357 91, H01L 21265

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041135164

ABSTRACT:
A method is disclosed whereby a region having a varying conductivity profile and depth is formed in a body of semiconductor material. The method includes the step of implanting conductivity modifiers beneath a curved surface of the body. Such a region, fabricated by the present method, is particularly useful as one element of a semi-conductor device.

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C. L. Bertin, "Lateral Transistor with Built-In Electric Field", IBM Tech. Disc. Bull. 16, (1973) 280.
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A. Lekholm et al., "Edge-Breakdown in Mesa Diodes", IEEE Trans. Electronic Devices, ED-18, (1971) 844.

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