Method of forming a contact in a pixel cell

Details Method of forming a contact in a pixel cell Method of forming a contact in a pixel cell

2006-05-02

2006-05-02

Nelms, David (Department: 2818)

Semiconductor device manufacturing: process

Making conductivity modulation device

Reexamination Certificate

active

07037764

ABSTRACT:
A method of implanting, for example, a phosphorous plug over a charge collection region and a method of forming a contact over the phosphorous plug implant and charge collection region. The method allows implantation of phosphorous or other materials without contamination of other contact regions. The method further allows implantation of a material with only one step and without an extra masking step.

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patent: 2005/0023553 (2005-02-01), Rhodes

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