Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate
2011-04-19
2011-04-19
Chen, Bret (Department: 1715)
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
C427S255394, C427S249100, C427S255360
Reexamination Certificate
active
07927663
ABSTRACT:
Wear resistance of the prior-art Ti(C,N) layers can be considerably enhanced by optimizing the grain size and microstructure. This invention describes a method to obtain controlled, fine, equiaxed grain morphology in Ti(C,N) layers produced using moderate temperature CVD (MTCVD). The method includes the step of doping using CO, CO2, ZrC14and A1C13or combinations of these to control the grain size and shape. Doping has to be controlled carefully in order to avoid nanograined structures and oxidization. Doping is further controlled to produce grain size that is from about 50 to about 300 nm, preferably from about 50 to about 150; a lack of any strong preferred growth orientation; and a length-to-width ratio (L/W) of less than 3 and only with a slight to moderate XRD line broadening.
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Chen Bret
Drinker Biddle & Reath LLP
Seco Tools AB
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