Method of forming a coating film and coating apparatus

Details Method of forming a coating film and coating apparatus Method of forming a coating film and coating apparatus

1996-11-29

1998-09-08

Edwards, Laura

Coating apparatus

Projection or spray type

Rotating turret work support

118 52, 118 72, 134 53, 15302, B05B 1302, B05C 1100, B08B 300

Patent

active

058039708

ABSTRACT:
A method of forming a coating film, in which the coating film is formed by supplying a coating liquid onto a surface of a substrate, while the substrate housed in a processing vessel is rotated together with the processing vessel, includes the steps of coating the surface of the substrate with a solvent, supplying the coating liquid to the substrate, rotating the substrate and the processing vessel at a first rotation speed to diffuse the coating liquid on the surface of the substrate, closing the processing vessel with a lid to seal the substrate in the processing vessel, and rotating the processing vessel with the lid and the substrate at a second rotation speed to uniform a film thickness of the coating film.

REFERENCES:
patent: 4790262 (1988-12-01), Nakayama et al.
patent: 5002008 (1991-03-01), Ushijima et al.
patent: 5349978 (1994-09-01), Sago et al.
patent: 5439519 (1995-08-01), Sago et al.
patent: 5449405 (1995-09-01), Cardinali et al.
patent: 5536128 (1996-07-01), Shimoyashiro et al.
patent: 5705223 (1998-01-01), Bunkofske

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