Method of forming a charge coupled device with stripe layers cor

Details Method of forming a charge coupled device with stripe layers cor Method of forming a charge coupled device with stripe layers cor

1998-12-16

2000-07-25

Bowers, Charles

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

438 73, H01L 2100

Patent

active

060935820

ABSTRACT:
A charge coupled device and a method of manufacturing a charged coupled device includes a semiconductor substrate, a plurality of photoelectrical conversion cells formed in the semiconductor substrate in a matrix form, a plurality of vertical charge coupled device regions formed between the plurality of photoelectrical conversion cells, a plurality of stripe layers formed on the semiconductor substrate and corresponding to the plurality of vertical charge coupled device regions, and a plurality of microlenses formed on the semiconductor substrate and corresponding to the plurality of photoelectrical conversion cells.

REFERENCES:
patent: 5422285 (1995-06-01), Ishibe

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