Fishing – trapping – and vermin destroying
Patent
1989-03-13
1990-06-12
Hearn, Brian E.
Fishing, trapping, and vermin destroying
148DIG6, 148DIG51, 148DIG71, 148DIG94, 148DIG110, 156613, 156649, 427 531, 437173, 437228, 437935, 437936, H01L 2120
Patent
active
049332996
ABSTRACT:
MOVPE growth and photoetching are integrated into a unified sequence which is carried out without removing a workpiece from a MOVPE reactor. Growth may be carried out before, after or before and after the etching.
To prevent pattern broadening by diffussion of the active species the substrate is preferably protected by a fugitive coating which is removed by the illumination. Native oxide coatings are particularly suitable for InGaAsP substrates. These are conveniently applied for exposing to substrate to 20.degree./o O.sub.2 +80.degree./oN.sub.2 for about 3 minutes at 450.degree. C.
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patent: 4560576 (1985-12-01), Lewis et al.
patent: 4592306 (1986-06-01), Gallego
patent: 4624736 (1986-11-01), Gee et al.
Eden, "Photochemical Processing of Semiconductors," IEEE Circuits and Devices, Jan. 1986, pp. 18-24.
Uchida et al.,". . . In Situ Dry Etching and Deposition Processing System," IEEE J. Quan. Elect., vol. 24, No. 11, Nov. 1988, pp. 2170-77.
Aoki et al., "Effect of Photochemical Etching . . .", Electron. Lett., 13th Aug. 1987, vol. 23 No. 17, pp. 891-892.
British Telecommunications public limited company
Bunch William
Hearn Brian E.
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