Method of fluorine doped modified chemical vapor deposition

Details Method of fluorine doped modified chemical vapor deposition Method of fluorine doped modified chemical vapor deposition

1990-01-02

1990-11-06

Lacey, David L.

Glass manufacturing

Processes

Forming product or preform from molten glass

65DIG16, 65 182, C03C 2502

Patent

active

049683390

ABSTRACT:
A fluorine-doped silica soot cylinder (11) is consolidated by containing it within an encapsulation structure (29) within a furnace (21). The atmosphere within the encapsulation structure is kept substantially stagnant during the consolidating, and the volume enclosed by the encapsulation structure (29) is only slightly greater than the volume of the soot cylinder (11). A gap (52) between the volume enclosed by the encapsulating structure and the furnace is kept small enough to impede gas flow to a sufficient extent that the atmosphere within the encapsulating structure (29) is substantially stagnant during consolidation. During consolidation, fluorine concentration within the encapsulation structure (29) is uniformly distributed within the soot cylinder (11).

REFERENCES:
patent: 4643751 (1987-02-01), Abe
patent: 4648891 (1987-03-01), Abe

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