Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1998-03-26
1999-12-07
Ballato, Josie
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
G01R 3126
Patent
active
059990112
ABSTRACT:
This invention describes a method for improving the test time for hot carrier injection effects in CMOS transistors. In conventional testing of hot carrier effects a stress voltage is applied between the drain and the source of a transistor. This stress voltage is limited by the drain to source punch-through voltage. In the enhance method described within, a substrate back bias is applied that extends the punch-through voltage and allows a higher drain to source stress voltage. With the higher stress voltage the amount of time needed to test parameter degradation caused by hot carrier injection is substantially reduced.
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C.Y. Chang and S.M. Sze, "ULSI Technology", McGraw Hill, 1996, pp. 657-662. (No Month Available).
Chu Li-Huan
Lee Wen-Chung
Ackerman Stephen B.
Ballato Josie
Saile George O.
Taiwan Semiconductor Manufacturing Company
Tang Minh
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