Method of fabrication of thin film resistor with 0 TCR

Details Method of fabrication of thin film resistor with 0 TCR Method of fabrication of thin film resistor with 0 TCR

2006-03-14

2006-03-14

Easthom, Karl D. (Department: 2832)

Electrical resistors

Resistance value temperature-compensated

33, 33

Reexamination Certificate

active

07012499

ABSTRACT:
A thin film resistor that has a substantially zero TCR is provided as well as a method for fabricating the same. The thin film resistor includes at least two resistor materials located over one another. Each resistor material has a different temperature coefficient of resistivity such that the effective temperature coefficient of resistivity of the thin film resistor is substantially 0 ppm/° C. The thin film resistor may be integrated into a interconnect structure or it may be integrated with a metal-insulator-metal capacitor (MIMCAP).

REFERENCES:
patent: 3876912 (1975-04-01), Sanders
patent: 4104607 (1978-08-01), Jones
patent: 4464646 (1984-08-01), Burger et al.
patent: 4677413 (1987-06-01), Zandman et al.
patent: 5039976 (1991-08-01), Drabkin
patent: 5448103 (1995-09-01), de Wit
patent: 5554873 (1996-09-01), Erdeljac et al.
patent: 5643834 (1997-07-01), Harada et al.
patent: 5683928 (1997-11-01), Wojnarowski et al.
patent: 6097276 (2000-08-01), Van Den Broek et al.
patent: 6272736 (2001-08-01), Lee
patent: 6534374 (2003-03-01), Johnson et al.
patent: 6614342 (2003-09-01), Kanamori
patent: 262506 (1988-11-01), None
patent: 3-131002 (1991-06-01), None
patent: 3-173101 (1991-07-01), None
DD 262 506 Schutze English translation (Nov. 1988).

Affiliated with

Also associated with

Rating

Method of fabrication of thin film resistor with 0 TCR does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of fabrication of thin film resistor with 0 TCR, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of fabrication of thin film resistor with 0 TCR will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3568581