Method of fabrication of semiconductor integrated circuit...

Details Method of fabrication of semiconductor integrated circuit... Method of fabrication of semiconductor integrated circuit...

2006-08-29

2006-08-29

Geyer, Scott B. (Department: 2812)

Semiconductor device manufacturing: process

Miscellaneous

C414S935000

Reexamination Certificate

active

07098156

ABSTRACT:
The conveyance of wafers in bays (equipment groups) of a clean room is performed by RGVs (Rail Guided Vehicles) that linearly travel at high speed on conveying rails laid on the floor of the clean room. A structure is adopted wherein a conveying area, over which the RGV travels, is separated from a human working area by a compartment (partition), and a human is not allowed to enter the conveying area upon operation of a line.

REFERENCES:
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patent: 11-330197 (1999-11-01), None
patent: 2001-102427 (2001-04-01), None
International Search Report for PCT/JP02/03391.

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