Method of fabrication of air/fuel sensors based on electrochemic

Details Method of fabrication of air/fuel sensors based on electrochemic Method of fabrication of air/fuel sensors based on electrochemic

1987-12-28

1988-12-13

Kaplan, G. L.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

156652, 156656, 156657, 1566591, 156662, 204425, G01N 2758

Patent

active

047909242

ABSTRACT:
A method is disclosed for making planar oxygen-solid electrolyte sensors. The method involves coating the several layers onto a support, selectively etching an etchable layer to form areas wherein the electrode layers and electrolyte layers may be formed thereon and, finally, etching the etchable layer totally away in order to form a chamber therein.

REFERENCES:
patent: 4668374 (1987-05-01), Bhagat et al.
patent: 4671852 (1987-06-01), Pyke

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