Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1976-08-30
1978-01-03
Tupman, W.
Metal working
Method of mechanical manufacture
Assembling or joining
357 24, B01J 1700
Patent
active
040658473
ABSTRACT:
The fabrication of a charge-coupled device consists in forming an insulating layer in the form of a periodic series of insulating steps, in depositing a metallic layer on alternate steps so as to form electrodes, in implanting regions doped with a type opposite to the substrate into the surface of the semiconductor by directing an ion beam through the insulating steps of small thickness which are transparent to the beam, and in connecting each electrode to a control line.
REFERENCES:
patent: 3697786 (1972-10-01), Smith
patent: 3739237 (1973-06-01), Shannon
patent: 3796932 (1974-03-01), Amelio
patent: 3852120 (1974-12-01), Johnson
Borel Joseph
Lacour Jacques
Merckel Gerard
Commissariat a l''Energie Atomique
Tupman W.
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