Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Coating
Patent
1998-03-17
1999-08-17
King, Roy V.
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Coating
505473, 505731, 505120, 20419224, 427 62, H01L 3924, C23C 1434
Patent
active
059393610
ABSTRACT:
A substrate is set in a reaction chamber, to heat the substrate to a predetermined temperature. Tl, Ba, Ca, Cu and O are supplied to the substrate by a Tl evaporation source and a target, to cause a TlBaCaCuO film to grow on the substrate. The TlBaCaCuO film is crystallized for each formation of each of its blocks each having a layered structure. In an incomplete block which is being formed, the amount of evaporation of Tl by the heating is large, so that the amount of evaporation of Tl varies depending on the ratio of an uncrystallized region on its surface. In a complete block after the formation, the amount of evaporation of Tl by the heating is small, and is approximately constant. Film growth is stopped for a predetermined time period for each formation of the block, to control the amount of supply of Tl depending on the forming step of the block.
REFERENCES:
patent: 5112800 (1992-05-01), Hermann et al.
Holstein et al, Appl. Phys. lett. 61(8) Aug. 1992, pp. 982-984.
Japanese Journal of Applied Physics, vol. 25, No. 10, pp. L868-L870, Oct. 1986.
King Roy V.
Sanyo Electric Co,. Ltd.
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