Etching a substrate: processes – Forming or treating optical article
Reexamination Certificate
2005-11-29
2005-11-29
Ahmed, Shamim (Department: 1765)
Etching a substrate: processes
Forming or treating optical article
C216S026000, C204S192170, C430S321000
Reexamination Certificate
active
06969472
ABSTRACT:
A method for manufacturing hemi-cylindrical and hemi-spherical micro structures is provided. A pattern is formed onto a substrate, and a layer of material is subsequently grown onto the substrate. Due to growth characteristics, the layer will form radially symmetric features when grown to an appropriate thickness.
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Guerra John M.
Sullivan Paul F.
Vezenov Dmitri V.
Wan Leonard
Ahmed Shamim
LSI Logic Corporation
Maiorana Christopher P.
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