Method of fabricating solid state image sensing elements

Details Method of fabricating solid state image sensing elements Method of fabricating solid state image sensing elements

1995-06-06

1997-09-30

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

437228, 437229, 15666111, 216 26, 430321, 359619, 359623, 257432, H01L 21312, H01L 31101

Patent

active

056725191

ABSTRACT:
This invention relates to microlenses of the solid state image sensing element and the method for fabricating the microlenses of the solid image sensing elements, which provides a solid state image sensing element including a substrate, photo diode areas each having a plurality of photo diodes in matrix array formed on the substrate, a flat area formed over the substrate including the photo diode areas, color filter layers formed in predetermined areas on the flat area, a top coating layer formed over the substrate including the color filter areas, stripe microlenses each having a flat upper surface arranged correspond corresponding to the photo diodes arranged in one direction in the photo diode areas and formed on the top coating layer, and mosaic microlenses formed on the flat upper surface of the stripe microlens each arranged corresponding to each of the photo diodes in the photo diode area.

REFERENCES:
patent: 4694185 (1987-09-01), Weiss
patent: 5118924 (1992-06-01), Mehra et al.
patent: 5239412 (1993-08-01), Naka et al.
patent: 5293267 (1994-03-01), Nakai
patent: 5321297 (1994-06-01), Enomoto

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