Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1983-01-10
1984-06-05
Weisstuch, Aaron
Metal working
Method of mechanical manufacture
Assembling or joining
136256, 427 74, 427 88, 427 94, 148189, H01L 3118
Patent
active
044519699
ABSTRACT:
A solar cell fabrication procedure is described which is characterized by (1) formation of a "polysilazane" coating on a silicon substrate, (2) photo-lithography of the polysilazane coating to form a plating mask pattern, (3) a heating step which removes residual photoresist and converts the polysilazane coating to a denser form of silicon nitride having a reduced etch rate, and (4) use of densified silicon nitride as a mask for the plating of electrode metal and also as an anti-reflection coating.
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F. W. Sexton, "Plasma Nitride AR Coatings for Silicon Solar Cells", Solar Energy Mat'ls, vol. 7, pp. 1-14 (1982).
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M. G. Coleman et al., "Phase 2 of the Automated Array Assembly Task of the Low Cost Silicon Solar Array Project", pp. i-iv, 10-15, 37, 202-204, DOE/JP1/954847-4, Nov. 1978.
Mobil Solar Energy Corporation
Weisstuch Aaron
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