Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate
2006-12-19
2006-12-19
Baumeister, B. William (Department: 2891)
Semiconductor device manufacturing: process
With measuring or testing
Optical characteristic sensed
C438S036000, C257SE21521
Reexamination Certificate
active
07151004
ABSTRACT:
In fabricating a semiconductor laser producing light with a wavelength of 770 to 810 nm, impurities are introduced into an MQW active layer near a light emitting facet of the laser to form a disordered region constituting a window layer. Pump light is applied to the window layer to generate photoluminescence whose wavelength λ dpl (nm) is measured. A blue shift amount λ bl (nm) is defined as the difference between the wavelength λ apl (nm) 0f photoluminescence generated by application of pump light to the active layer on the one hand, and the wavelength λ dpl (nm) of photoluminescence from the window layer under pump light irradiation on the other hand. The blue shift amount λ bl is referenced during the fabrication process in order to predict catastrophic optical damage levels of semiconductor lasers.
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Kawazu Zempei
Nishiguchi Harumi
Shima Akihiro
Tashiro Yoshihisa
Yagi Tetsuya
Baumeister B. William
Mitsubishi Denki & Kabushiki Kaisha
Reames Matthew L.
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