Fishing – trapping – and vermin destroying
Patent
1996-10-31
1997-12-02
Niebling, John
Fishing, trapping, and vermin destroying
437200, 437228, H01L 21265
Patent
active
056935501
ABSTRACT:
A titanium film and a polysilicon film are caused to react with each other to produce a TiSi.sub.2 layer of silicide. Thereafter, an upper end of a side wall is polished off to remove an electrically conductive TiSix layer which has been formed on the upper end of the side wall at the same time that the silicide has been formed. It is thus possible to keep low the layer resistance of the silicide layer on a gate electrode and a source-drain region and to prevent the source-drain region and the gate electrode from being short-circuited.
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patent: 5576227 (1996-11-01), Hsu
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"Study of the Rapid Thermal Nitridation and Silicidation of Ti using Elastic Recoil Detection. II. Ti on SiO.sub.2 " Krooshof et al J. Appl. Phys. 63 (10), May 15, 1988; 1988 Institute of Physics; pp. 5110-5114.
"Titanium Disilicide Self-Aligned Source/Drain+Gate Technology" Lau et al IEEE; 1982; pp. 714-717, month unknown.
Booth Richard A.
NEC Corporation
Niebling John
LandOfFree
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