Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1981-01-16
1982-03-23
Weisstuch, Aaron
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
29572, 427531, 427 74, H01L 3118
Patent
active
043210996
ABSTRACT:
A Schottky barrier solar cell consists of a thin substrate of low cost material with at least the top surface of the substrate being electrically conductive. A thin layer of heavily doped n-type polycrystalline germanium, with crystalline sizes in the submicron range, is deposited on the substrate. But first a passivation layer may be deposited on the substrate to prevent migration of impurities into the polycrystalline germanium on a substrate of low-cost conductive material. Then the polycrystalline germanium is recrystallized to increase the crystal sizes in the germanium layer to not less than 5 microns, and preferably considerably more. It serves as a base layer on which a thin layer of gallium arsenide is vapor-epitaxially grown to a selected thickness. Then, a thermally-grown oxide layer of a thickness of several tens of angstroms is formed on the gallium arsenide layer. A metal layer, of not more than about 100 angstroms thick, is deposited on the oxide layer, and a grid electrode is deposited to be in electrical contact with the top surface of the metal layer. An antireflection coating may be deposited on the exposed top surface of the metal layer. In another embodiment, the recrystallized germanium layer serves as the substrate for a Schottky barrier solar cell with more than one active semiconductor layer. The techniques of forming the oxide layer are also applicable in forming an oxide layer between a metal layer and a semiconductor material which together form a Schottky barrier junction in any solar cell.
REFERENCES:
patent: 3368125 (1968-02-01), Pasierb
patent: 3952323 (1976-04-01), Tanimura et al.
V. Y. Doo, "Thin Silicon Film Growth on Polycrystalline Alumina Ceramic", J. Electrochem. Soc., vol. 111, pp. 1196-1198 (1964).
H. Hovel, "Semiconductors & Semimetals-vol. 11-Solar Cells", Academic Press, 1975, pp. 103-109.
Frosch Robert A. Administrator of the National Aeronautics and Space
Stirn Richard J.
Yeh Yea-Chuan M.
Manning John R.
McCaul Paul F.
Weisstuch Aaron
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