Method of fabricating rare earth doped planar optical waveguide

Details Method of fabricating rare earth doped planar optical waveguide Method of fabricating rare earth doped planar optical waveguide

1991-05-17

1992-08-25

Jones, W. Gary

Glass manufacturing

Processes

With shaping of particulate material and subsequent fusing...

65 183, 65 31, C03B 518

Patent

active

051415496

ABSTRACT:
A method of fabricating rare earth doped planar optical waveguides for integrated optical circuits includes introducing a first carrier gas to a heated column of rare earth chelate to create a flow of rare earth chelate vapor in the carrier; introducing a second carrier gas through a silicon precursor to create a flow of silicon precursor vapor in the carrier; submitting the flow of rare earth chelate vapor and the flow of silicon precursor vapor with oxygen and a homogenizing agent to a flame hydrolysis deposition burner to produce a soot of rare earth doped silica; and depositing the soot on a planar substrate; and etching the soot, after consolidation, to define one or more discrete channel waveguides.

REFERENCES:
patent: 3737292 (1973-06-01), Keck et al.
patent: 3873339 (1975-03-01), Hudson
patent: 4501602 (1985-02-01), Miller et al.
patent: 4718929 (1988-01-01), Power et al.
patent: 4826288 (1989-05-01), Mansfield et al.

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