Fishing – trapping – and vermin destroying
Patent
1994-02-01
1995-06-13
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 46, 437918, H01L 2172
Patent
active
054242398
ABSTRACT:
A method of fabricating a resistor which comprises the steps of providing a semiconductor substrate, preferably silicon, forming a layer of oxide over the substrate, providing on the layer of oxide a region of material having a substantially higher resistance in the undoped state than in the doped state, preferably polysilicon, patterning a region over the material to expose predetermined regions of the material, doping the exposed regions of the material to a predetermined doping level substantially greater than the doping level of the original material, masking the doped regions and a portion of the previously unexposed regions of the material on spaced apart portions of the doped regions and etching away the exposed region of material external to the doped regions and external to the portion of the previously unexposed regions of the material on spaced apart portions of the doped regions.
REFERENCES:
patent: 4602421 (1986-07-01), Lee et al.
patent: 5196233 (1993-03-01), Chan et al.
Lane et al., "The Design of Thin-Film Polysilicon Resistors for Analog IC Applications", IEEE Trans. on Electron Devices, vol. 36, No. 4, pp. 738-744, Apr. 1989.
Chaudhari Chandra
Donaldson Richard L.
Hearn Brian E.
Hiller William E.
Sorensen Douglas A.
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