Method of fabricating oxide superconducting films by laser depos

Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Coating

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505730, 505732, 427 62, 427596, 4271263, B05D 306, B05D 512

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055344895

ABSTRACT:
An oxide superconducting film is formed using laser deposition of applying an excimer laser beam (1, 21) onto a target (3, 23) through a converging lens (2, 22) and depositing atoms and/or molecules scattered from the target (3, 23) on the base material (5). The converging lens (2) is prepared by a cylindrical lens, or the converging lens (22) is moved, so that a portion (4, 25) irradiated with the laser beam (1, 21) on the target (3, 23) is linearized. Thus, it is possible to form an oxide superconducting film which is homogeneous over a region having a relatively large area on the base material (5) not only in film thickness but also in property.

REFERENCES:
Mashburn et al, "Deposition of high Tc superconductor thin films by pulsed laser ablation", MRS vol. 99, Nov. 1987 pp. 699-702.
Lowndes et al, "In Situ growth of high quality epitaxial YBa.sub.2 Cu.sub.3 O.sub.7-x thin films at moderate temperatures by pulsed laser ablation", MRS Fall Meeting, (Boston, MA) Nov. 1989.
Witanachchi et al, "Deposition of superconducting Y-Ba-Cu-O films at 400.degree. C. without post-annealing", Appl. Phys. lett. 53(3) Jul. 1988 pp. 234-236.
Burton et al, "Reactive laser deposition of high-Tc superconducting thin films", High-Temperature Superconductors II ed. by Capone II et al, Apr. 1988 (Reno, Nevada) pp. 77-80.
S. Miura et al., "Structure and superconducting properties of Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-.delta. films prepared by transversely excited atmospheric pressure CO.sub.2 pulsed laser evaporation" Applied Physics Letters, vol. 52, No. 12, 21 Mar. 1988, pp. 1008-1010, New York US.
O. Eryu et al., "Formation of high Tc superconducting films by laser induced filaments" Nuclear Instruments And Methods In Physics Research B, vol. 39, No. 1-4, Mar. 1989, pp. 640-643, Amsterdam, NL.
B. Roas et al., "Epitaxial growth of YBa.sub.2 Cu.sub.3 O.sub.7-x thin films by a laser evaporation process" Applied Physics Letters, vol. 53, No. 16, 17 Oct. 1988, pp. 1557-1559, New York, US.

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