Method of fabricating oxide superconducting films by laser depos

Details Method of fabricating oxide superconducting films by laser depos Method of fabricating oxide superconducting films by laser depos

1993-10-04

1995-09-05

King, Roy V.

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

Coating

505434, 505732, 505230, 427 62, 427596, 4271263, B05D 306, B05D 512

Patent

active

054479100

ABSTRACT:
An oxide superconducting film is formed using laser deposition of applying an excimer laser beam (1, 21) onto a target (3, 23) through a converging lens (2, 22) and depositing atoms and/or molecules scattered from the target (3, 23) on the base material (5). The converging lens (2) is prepared by a cylindrical lens, or the converging lens (22) is moved, so that a portion (4, 25) irradiated with the laser beam (1, 21) on the target (3, 23) is linearized. Thus, it is possible to form an oxide superconducting film which is homogeneous over a region having a relatively large area on the base material (5) not only in film thickness but also in property.

REFERENCES:
Mashburn et al, "Deposition of high Tc superconductor thin films by pulsed laser ablation," MRS, vol. 99, Nov. 1987, pp. 699-702.
Lowndes et al, "In situ growth of high quality epitaxial YBa.sub.2 Cu.sub.3 O.sub.7-x thin films at moderate temperatures by pulsed laser ablation", MRS, Fall Meeting (Boston, Mass.) 1989 pp. 1-4.
Burton et al, "Reactive laser deposition of high-Tc superconducting thin films" High-temperature Superconductors II, Edited by Capon II et al, Apr. 1988 pp. 77-80.

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