Method of fabricating orientation film for liquid crystal...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from solid or gel state

Reexamination Certificate

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C117S092000, C117S095000, C117S103000

Reexamination Certificate

active

11113760

ABSTRACT:
A method of fabricating an orientation film for a liquid crystal display device is provided. An orientation film is formed on a substrate. An ion-beam irradiation apparatus having an ion generation element is provided. The substrate is placed on a stage in a vacuum chamber. The angle of the substrate is controlled such that the orientation film has a predetermined angle with respect to an ion beam of the ion-beam irradiation apparatus. An ion beam from the ion-beam irradiation apparatus irradiates a surface of the orientation film. The ion beam has an energy intensity of about 300 eV to about 800 eV and a predetermined dose.

REFERENCES:
patent: 5770826 (1998-06-01), Chaudhari et al.
patent: 10-1999-0057123 (1999-07-01), None
Office Action dated Dec. 14, 2005 for corresponding Korean Application No. 10-2004-0028572.

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