Method of fabricating optical waveguide devices with smooth...

Details Method of fabricating optical waveguide devices with smooth... Method of fabricating optical waveguide devices with smooth...

2007-01-16

2007-01-16

Kianni, Kaveh (Department: 2883)

Optical waveguides

Planar optical waveguide

C385S130000, C385S131000

Reexamination Certificate

active

10727201

ABSTRACT:
One or more embodiments of the instant invention may be briefly summarized as follows. A planarization and smoothing segment includes: (a) a reverse mask and etching method; a sacrificial layer and selective CMP followed by non selective CMP; or a sacrificial layer and selective etching followed by non-selective CMP. A buffer layer to protect wave guide segment includes: (a) waveguide formation followed by buffer layer deposition; or a buffer deposition over the waveguide layer followed by waveguide formation.

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“PECVD Growth Multiple Core Planar Waveguides with Extremely Low Interface Reflections and Losses” by Christian Laurent-Lund et al., IEEE Photonics Tech. Letters, vol. 10, No. 10, Oct. 1998 , pp. 1431-1433.

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